Hydrofluoric acid 4,9%, CMOS™ for Microelectronic, J.T. Baker®

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5397-03
Hydrofluoric acid 4,9%, CMOS™ for Microelectronic, J.T. Baker®
Hydrofluoric acid
Formula: HF
MW: 20,01 g/mol
Storage Temperature: Ambient
MDL Number: MFCD00011346
CAS Number: 7664-39-3
EINECS: 231-634-8
UN: 1790
ADR: 8,II

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Specification Test Results

For Microelectronic Use
Assay (HF) 4.80 - 5.00 %
Color (APHA) ≤ 10
Fluosilicic Acid (H₂SiF₆) ≤ 0.010 %
Residue after Ignition ≤ 1 ppm
Chloride (Cl) ≤ 3 ppm
Nitrate (NO₃) ≤ 2 ppm
Phosphate (PO₄) ≤ 0.7 ppm
Sulfate and Sulfite (as SO₄) ≤ 3 ppm
Trace Impurities - Aluminum (Al) ≤ 50.0 ppb
Arsenic and Antimony (as As) ≤ 30.0 ppb
Trace Impurities - Barium (Ba) ≤ 20.0 ppb
Trace Impurities - Boron (B) ≤ 20.0 ppb
Trace Impurities - Cadmium (Cd) ≤ 20.0 ppb
Trace Impurities - Calcium (Ca) ≤ 50.0 ppb
Trace Impurities - Chromium (Cr) ≤ 10.0 ppb
Trace Impurities - Cobalt (Co) ≤ 20 ppb
Trace Impurities - Copper (Cu) ≤ 10.0 ppb
Trace Impurities - Gallium (Ga) ≤ 20.0 ppb
Trace Impurities - Germanium (Ge) ≤ 50.0 ppb
Trace Impurities - Gold (Au) ≤ 10.0 ppb
Heavy Metals (as Pb) ≤ 100 ppb
Trace Impurities - Iron (Fe) ≤ 50.0 ppb
Trace Impurities - Lead (Pb) ≤ 20.0 ppb
Trace Impurities - Lithium (Li) ≤ 20.0 ppb
Trace Impurities - Magnesium (Mg) ≤ 50.0 ppb
Trace Impurities - Manganese (Mn) ≤ 20.0 ppb
Trace Impurities - Nickel (Ni) ≤ 20.0 ppb
Trace Impurities - Potassium (K) ≤ 50 ppb
Trace Impurities - Silicon (Si) ≤ 1000.0 ppb
Trace Impurities - Silver (Ag) ≤ 10.0 ppb
Trace Impurities - Sodium (Na) ≤ 100.0 ppb
Trace Impurities - Strontium (Sr) ≤ 20.0 ppb
Trace Impurities - Tin (Sn) ≤ 50 ppb
Trace Impurities - Titanium (Ti) ≤ 50.0 ppb
Trace Impurities - Zinc (Zn) ≤ 50 ppb
Particle Count - 0.5 µm and greater ≤ 60 par/ml
Particle Count - 1.0 µm and greater ≤ 8 par/ml

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